Optical emission spectroscopy of nitrogen species and plasma plume induced by laser ablation combined with pulse modulated radio-frequency discharge

Name: Optical emission spectroscopy of nitrogen species and plasma plume induced by laser ablation combined with pulse modulated radio-frequency discharge
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Jelínek, Miroslav; Lančok, Ján; Tomov, R.; Zelinger, Zdeněk

Number of the records: 1

Optical emission spectroscopy of nitrogen species and plasma plume induced by laser ablation combined with pulse modulated radio-frequency discharge

1.

SYSNO ASEP	0133919
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Ostatní články
Title	Optical emission spectroscopy of nitrogen species and plasma plume induced by laser ablation combined with pulse modulated radio-frequency discharge
Author(s)	Jelínek, Miroslav (FZU-D)_{RID, ORCID} Lančok, Ján (FZU-D)_{RID, ORCID} Tomov, R. (BG) Zelinger, Zdeněk (UFCH-W)_{RID, ORCID}
Source Title	Spectrochimica Acta Part A-Molecular and Biomolecular Spectroscopy. - : Elsevier - ISSN 1386-1425 Roč. 58, - (2002), s. 1513-1521
Number of pages	9 s.
Language	eng - English
Country	NL - Netherlands
Keywords	optical emission spectroscopy ; laser ablation ; carbon nitride films
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	IAA1010110 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z1010914 - FZU-D
Annotation	Influence of RF power, nitrogen pressure, modulation frequency and pulse rate on nitrogen species production was researched.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2003

Number of the records: 1