0133919 - FZU-D 20020203 RIV NL eng J - Journal Article
Jelínek, Miroslav - Lančok, Ján - Tomov, R. - Zelinger, Zdeněk
Optical emission spectroscopy of nitrogen species and plasma plume induced by laser ablation combined with pulse modulated radio-frequency discharge.
Spectrochimica Acta Part A-Molecular and Biomolecular Spectroscopy. Roč. 58, - (2002), s. 1513-1521. ISSN 1386-1425. E-ISSN 1873-3557
R&D Projects: GA AV ČR IAA1010110
Institutional research plan: CEZ:AV0Z1010914
Keywords : optical emission spectroscopy * laser ablation * carbon nitride films
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.046, year: 2002

Influence of RF power, nitrogen pressure, modulation frequency and pulse rate on nitrogen species production was researched.
Permanent Link: http://hdl.handle.net/11104/0031867