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The radio frequency hollow cathode discharge induced by the RF discharge in the plasma-jet chemical reactor
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SYSNO ASEP 0133852 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title The radio frequency hollow cathode discharge induced by the RF discharge in the plasma-jet chemical reactor Author(s) Touš, Jan (FZU-D)
Šícha, Miloš (FZU-D)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Soukup, Ladislav (FZU-D)
Jastrabík, Lubomír (FZU-D) RID, ORCID
Čada, Martin (FZU-D) RID, ORCID, SAI
Tichý, M. (CZ)Source Title Contributions to Plasma Physics. - : Wiley - ISSN 0863-1042
Roč. 42, č. 1 (2002), s. 119-131Number of pages 13 s. Language eng - English Country DE - Germany Keywords hollow cathode discharge ; supersonic plasma jet ; sputtering Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects GA202/00/1592 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z1010914 - FZU-D Annotation The present paper deals with experimental study of this RF hollow cathode discharge. The stress is laid on the investigations of the axial distribution of discharge parameters and sputtering processes inside the nozzle. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2003
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