0133852 - FZU-D 20020031 RIV DE eng J - Journal Article
Touš, Jan - Šícha, Miloš - Hubička, Zdeněk - Soukup, Ladislav - Jastrabík, Lubomír - Čada, Martin - Tichý, M.
The radio frequency hollow cathode discharge induced by the RF discharge in the plasma-jet chemical reactor.
Contributions to Plasma Physics. Roč. 42, č. 1 (2002), s. 119-131. ISSN 0863-1042. E-ISSN 1521-3986
R&D Projects: GA ČR GA202/00/1592
Institutional research plan: CEZ:AV0Z1010914
Keywords : hollow cathode discharge * supersonic plasma jet * sputtering
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 0.804, year: 2002

The present paper deals with experimental study of this RF hollow cathode discharge. The stress is laid on the investigations of the axial distribution of discharge parameters and sputtering processes inside the nozzle.
Permanent Link: http://hdl.handle.net/11104/0031806