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Structural properties of hot wire a-Si:H films deposited at rates in excess of 100 A/s
- 1.MAHAN, A. H., XU, Y., WILLIAMSON, D. L., BEYER, W., PERKINS, J. D., VANĚČEK, Milan, GEDVILAS, L. M., NELSON, B. P. Structural properties of hot wire a-Si:H films deposited at rates in excess of 100 A/s. Journal of Applied Physics. 2001, 90(10), 5038-5047. ISSN 0021-8979. E-ISSN 1089-7550.
Number of the records: 1