Number of the records: 1  

Energy resolved ion mass spectroscopy of the plasma during reactive magnetron sputtering

  1. 1.
    MIŠINA, Martin, SHAGINYAN, L. R., MAČEK, M., PANJAN, P. Energy resolved ion mass spectroscopy of the plasma during reactive magnetron sputtering. Surface and Coatings Technology. 2001, 142-144(-), 348-354. ISSN 0257-8972. E-ISSN 1879-3347.

Number of the records: 1  

  This site uses cookies to make them easier to browse. Learn more about how we use cookies.