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Energy resolved ion mass spectroscopy of the plasma during reactive magnetron sputtering
- 1.MIŠINA, Martin, SHAGINYAN, L. R., MAČEK, M., PANJAN, P. Energy resolved ion mass spectroscopy of the plasma during reactive magnetron sputtering. Surface and Coatings Technology. 2001, 142-144(-), 348-354. ISSN 0257-8972. E-ISSN 1879-3347.
Number of the records: 1