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Mechanical and optical properties of CN.sub.x./sub. films with high N/C ratio
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SYSNO ASEP 0133548 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Mechanical and optical properties of CNx films with high N/C ratio Author(s) Jelínek, Miroslav (FZU-D) RID, ORCID
Kulisch, W. (DE)
Delplancke-Ogletree, M. P. (BE)
Lančok, Ján (FZU-D) RID, ORCID
Jastrabík, Lubomír (FZU-D) RID, ORCID
Chvostová, Dagmar (FZU-D) RID, SAI, ORCID
Popov, C. (BG)
Bulíř, Jiří (FZU-D) RID, ORCID, SAISource Title Applied Physics A - Materials Science & Processing. - : Springer - ISSN 0947-8396
Roč. 73, - (2001), s. 167-170Number of pages 4 s. Language eng - English Country DE - Germany Keywords CNx films ; mechanical properties ; optical properties Subject RIV BM - Solid Matter Physics ; Magnetism CEZ AV0Z1010914 - FZU-D Annotation Nitrogen-rich carbon nitride films were prepared by three different deposition methods on fused silica, stainless steel and silicon cantilever substrates. Their optical properties were studied by spectroscopic ellipsometry and UV spectrometry. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2002
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