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Mechanical and optical properties of CN.sub.x./sub. films with high N/C ratio

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    0133548 - FZU-D 20010243 RIV DE eng J - Journal Article
    Jelínek, Miroslav - Kulisch, W. - Delplancke-Ogletree, M. P. - Lančok, Ján - Jastrabík, Lubomír - Chvostová, Dagmar - Popov, C. - Bulíř, Jiří
    Mechanical and optical properties of CNx films with high N/C ratio.
    Applied Physics A - Materials Science & Processing. Roč. 73, - (2001), s. 167-170. ISSN 0947-8396. E-ISSN 1432-0630
    Institutional research plan: CEZ:AV0Z1010914
    Keywords : CNx films * mechanical properties * optical properties
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Impact factor: 1.722, year: 2001

    Nitrogen-rich carbon nitride films were prepared by three different deposition methods on fused silica, stainless steel and silicon cantilever substrates. Their optical properties were studied by spectroscopic ellipsometry and UV spectrometry.
    Permanent Link: http://hdl.handle.net/11104/0000626

     
     

Number of the records: 1  

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