Study of RF discharge properties for hybrid pulsed laser deposition

Number of the records: 1

SYSNO ASEP	0133469
Document Type	K - Proceedings Paper (Czech conf.)
R&D Document Type	Conference Paper
Title	Study of RF discharge properties for hybrid pulsed laser deposition
Author(s)	Novotný, M. (CZ) Jelínek, Miroslav (FZU-D)_{RID, ORCID} Bulíř, Jiří (FZU-D)_{RID, ORCID, SAI} Zelinger, Zdeněk (UFCH-W)_{RID, ORCID} Lančok, Ján (FZU-D)_{RID, ORCID}
Source Title	Proceedings of Workshop 2001, A. - Praha : Czech Technical University, 2001 s. 114-115
Number of pages	2 s.
Action	Workshop 2001
Event date	00.02.2001
VEvent location	Praha
Country	CZ - Czech Republic
Event type	CST
Language	eng - English
Country	CZ - Czech Republic
Keywords	CN₂ ; pulsed laser deposition ; activation of nitrogen
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	IAA1010110 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	LN00A015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z1010914 - FZU-D
Annotation	We have created CN_{x layers by pulsed laser deposition (PLD) using graphite target in N}2 ambient and KrF excimer laser. We have found that active nitrogen plays an important role in this task. We have studied the influence of various RF parameters on the activation of nitrogen by optical emission spectroscopy.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2002

Number of the records: 1