0133370 - FZU-D 20010165 RIV CH eng J - Journal Article
Kulikovsky, V. - Boháč, Petr - Franc, František - Deineka, Alexander - Vorlíček, Vladimír - Jastrabík, Lubomír
Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering.
Diamond and Related Materials. Roč. 10, - (2001), s. 1076-1081. ISSN 0925-9635. E-ISSN 1879-0062
R&D Projects: GA ČR GA202/00/1592; GA MŠMT ME 305
Institutional research plan: CEZ:A02/98:Z1-010-914
Keywords : diamond-like carbon * structure * stress * hardness
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.902, year: 2001

In this paper the authors attempts to find the connection between the hardness, internal stress, resistivity and structure of a-C films obtained ba magnetron sputtering of carbon by varying the Ar pressure, the substrate bias and gas mixtures of Ar+CH4 or Ar+O2.
Permanent Link: http://hdl.handle.net/11104/0031342