Number of the records: 1
Laser deposition of CN.sub.x./sub. films combined with RF and hollow cathode discharges
- 1.0133326 - FZU-D 20010121 RIV MX eng J - Journal Article
Jelínek, Miroslav - Lančok, Ján - Jastrabík, Lubomír - Soukup, Ladislav - Šimečková, Marta - Zelinger, Z.
Laser deposition of CNx films combined with RF and hollow cathode discharges.
Superficies y Vacio. Roč. 9, - (1999), s. 303-305
Institutional research plan: CEZ:A02/98:Z1-010-914
Keywords : laser deposition * carbon nitride films * radiofrequency discharge * hollow cathode discharge * optical emission spectroscopy
Subject RIV: BM - Solid Matter Physics ; Magnetism
Pulsed laser deposition combined with additional RF and hollow cathode discharges for deposition of CNx films are studied.
Permanent Link: http://hdl.handle.net/11104/0031302
Number of the records: 1