Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films

Number of the records: 1

SYSNO	0133320
Title	Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films
Author(s)	Kulisch, W. (DE) Popov, C. (DE) Zambov, L. M. (DE) Bulíř, Jiří (FZU-D)_{RID, ORCID, SAI} Delplancke-Ogletree, M. P. (BE) Lančok, Ján (FZU-D)_{RID, ORCID} Jelínek, Miroslav (FZU-D)_{RID, ORCID}
Source Title	Thin Solid Films. 377-378, - (2000), s. 148-155. - : Elsevier
Document Type	Článek v odborném periodiku
CEZ	AV0Z1010914 - FZU-D
Language	eng
Country	NL
Keywords	carbon nitride * annealing * pulsed laser deposition * inductively coupled plasma chemical vapour deposition
Permanent Link	http://hdl.handle.net/11104/0031297

Number of the records: 1