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Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films

  1. 1.
    0133320 - FZU-D 20010115 RIV NL eng J - Journal Article
    Kulisch, W. - Popov, C. - Zambov, L. M. - Bulíř, Jiří - Delplancke-Ogletree, M. P. - Lančok, Ján - Jelínek, Miroslav
    Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films.
    Thin Solid Films. 377-378, - (2000), s. 148-155. ISSN 0040-6090. E-ISSN 1879-2731
    Institutional research plan: CEZ:AV0Z1010914
    Keywords : carbon nitride * annealing * pulsed laser deposition * inductively coupled plasma chemical vapour deposition
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Impact factor: 1.160, year: 2000
    Permanent Link: http://hdl.handle.net/11104/0031297
     

Number of the records: 1  

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