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Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films

  1. 1.
    KULISCH, W., POPOV, C., ZAMBOV, L. M., BULÍŘ, Jiří, DELPLANCKE-OGLETREE, M. P., LANČOK, Ján, JELÍNEK, Miroslav. Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films. Thin Solid Films. 2000, 377-378(-), 148-155. ISSN 0040-6090. E-ISSN 1879-2731.

Number of the records: 1  

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