0133268 - FZU-D 20010061 RIV CZ eng J - Journal Article
Keprt, Jiří - Bartoněk, L.
Measurement of thin films by computr processed video-signal.
Acta Universitatis Palackianae Olomucensis Facultas Rerum Naturalium. Roč. 39, - (2000), s. 139-159. ISSN 0231-9365
R&D Projects: GA MŠMT LN00A015
Institutional research plan: CEZ:AV0Z1010921
Subject RIV: BH - Optics, Masers, Lasers

The interferometrical measuring method of the optical thickness of thin films is presented in this report. The measurement of optical thickness of layers is realized by Michelson's interferometer and CCD camera.

Permanent Link: http://hdl.handle.net/11104/0031249