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Stress evolution in Ti-C:H films
- 1.KULIKOVSKY, V., FRANC, František, DEINEKA, Alexander, VORLÍČEK, Vladimír, JASTRABÍK, Lubomír. Stress evolution in Ti-C:H films. Journal of Physics D-Applied Physics. 2000, 33(-), 2880-2883. ISSN 0022-3727. E-ISSN 1361-6463.
Number of the records: 1