0132840 - FZU-D 20000094 RIV CH eng J - Journal Article
Maček, M. - Navinšek, B. - Panjan, P. - Kadlec, Stanislav - Wouters, S. - Quaeyhaegens, C. - Statls, L. M.
Energy and mass spectroscopy studies during triode ion plating of TiN films in two different layouts.
Surface and Coatings Technology. Roč. 113, - (1999), s. 149-156. ISSN 0257-8972. E-ISSN 1879-3347
R&D Projects: GA ČR GV106/96/K245
Institutional research plan: CEZ:AV0Z1010914
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.008, year: 1999

Plasma properties are compared in two triode ion-plating systems using a low-voltage arc discharge. The systems differ in the configuration of the chamber and magnetic field.
Permanent Link: http://hdl.handle.net/11104/0030837