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An ellipsometric study of W thin films deposited on Si

  1. 1.
    Deineka, A., Tarasenko, A. A., Jastrabík, L., Chvostová, D., Boušek, J. An ellipsometric study of W thin films deposited on Si. Thin Solid Films. 1999, 339(-), 216-219. ISSN 0040-6090. E-ISSN 1879-2731.

Number of the records: 1  

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