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Intrinsic microcrystalline silicon (.mu.c-Si:H) deposited by VHF-GD (very high frequency-glow discharge): a new material for photovoltaic and optoelectronics

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    Shah, A., Vallat-Sauvain, E., Torres, P., Meier, J., Kroll, U., Hof, C., Droz, C., Goerlitzer, M., Wyrsch, N., Vaněček, M. Intrinsic microcrystalline silicon (.mu.c-Si:H) deposited by VHF-GD (very high frequency-glow discharge): a new material for photovoltaic and optoelectronics. Materials Science and Engineering B-Advanced Functional Solid-State Materials. 2000, 69-70(-), 219-226. ISSN 0921-5107. E-ISSN 1873-4944.

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