0132755 - FZU-D 20000007 RIV DE eng J - Journal Article
Rezek, Bohuslav - Stuchlík, Jiří - Fejfar, Antonín - Kočka, Jan - Nebel, C. E. - Stutzmann, M.
Characterization of laser pattern a-Si:H thin films by combined AFM/Local Current Measurements.
Physica Status Solidi A. Roč. 170, č. 1 (1998), s. R1-R2. ISSN 0031-8965
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 0.782, year: 1998

Laser interference crystallization of amorphous hydrogenated silicon, followed by selective plasma-enhanced deposition and etching can be used for new large area microelectronic applications.
Permanent Link: http://hdl.handle.net/11104/0030757