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Sheet resistance of LiNbO.sub.3./sub. wafers processed in radio-ferquency plasma of hydrogen
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SYSNO 0132737 Title Sheet resistance of LiNbO3 wafers processed in radio-ferquency plasma of hydrogen Author(s) Turčičová, Hana (FZU-D) RID, ORCID
Prachařová, Jarmila (FZU-D)
Červená, Jarmila (UJF-V)
Vacík, Jiří (UJF-V) RID, ORCID, SAISource Title Czechoslovak Journal of Physics. Roč. 50, S3 (2000), s. 461-465. - : Springer Conference Symposium on Plasma Physics and Technology /19./, Praha, 06.06.2000-09.06.2000 Document Type Článek v odborném periodiku Grant GA202/98/1285 GA ČR - Czech Science Foundation (CSF) CZR10031, XX CEZ AV0Z1010914 - FZU-D Language eng Country CZ Permanent Link http://hdl.handle.net/11104/0000584
Number of the records: 1