Number of the records: 1
Sheet resistance of LiNbO.sub.3./sub. wafers processed in radio-ferquency plasma of hydrogen
- 1.Turčičová, Hana - Prachařová, Jarmila - Červená, Jarmila - Vacík, Jiří
Sheet resistance of LiNbO3 wafers processed in radio-ferquency plasma of hydrogen.
Czechoslovak Journal of Physics. Roč. 50, S3 (2000), s. 461-465. ISSN 0011-4626.
[Symposium on Plasma Physics and Technology /19./. Praha, 06.06.2000-09.06.2000]
R&D Projects: GA ČR GA202/98/1285
Grant - others:IAEA coord. res.proj.(XX) CZR10031
Impact factor: 0.298, year: 2000
http://hdl.handle.net/11104/0000584
Number of the records: 1