Sputtering of thin films

Number of the records: 1

SYSNO	0132645
Title	Sputtering of thin films
Author(s)	Musil, Jindřich (FZU-D)_{RID, ORCID}
Source Title	Kovine, Zlitine, Technologije. Roč. 31, 1-2 (1997), s. 107-111
Conference	Conference on Materials and Technology /4./, Portorož, 02.10.1996-06.10.1996
Document Type	Článek v odborném periodiku
Language	eng
Country	SI
Permanent Link	http://hdl.handle.net/11104/0030656

Number of the records: 1