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RF and DC plasma assisted laser deposition of a-CN.sub.x./sub. thin films

  1. 1.
    SYSNO0132514
    TitleRF and DC plasma assisted laser deposition of a-CNx thin films
    Author(s) Tomov, R. I. (BG)
    Jelínek, Miroslav (FZU-D) RID, ORCID
    Bulíř, Jiří (FZU-D) RID, ORCID, SAI
    Source TitleTenth International School on Quantum Electronics: Laser Physics and Applications. s. 344-348. - Bellingham : SPIE The International Society for Optical Engineering, 1999 / Atanosov P. ; Stoyanov D. V.
    Conference International School on Quantum Eklecttronics: Laser Physics and Aplications /10./, Varna, 21.09.1998-25.09.1998
    Document TypeKonferenční příspěvek (zahraniční konf.)
    Grant GA202/93/0464 GA ČR - Czech Science Foundation (CSF)
    Languageeng
    CountryUS
    Permanent Linkhttp://hdl.handle.net/11104/0030534
     

Number of the records: 1  

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