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RF and DC plasma assisted laser deposition of a-CN.sub.x./sub. thin films

  1. 1.
    SYSNO ASEP0132514
    Document TypeC - Proceedings Paper (int. conf.)
    R&D Document TypeConference Paper
    TitleRF and DC plasma assisted laser deposition of a-CNx thin films
    Author(s) Tomov, R. I. (BG)
    Jelínek, Miroslav (FZU-D) RID, ORCID
    Bulíř, Jiří (FZU-D) RID, ORCID, SAI
    Source TitleTenth International School on Quantum Electronics: Laser Physics and Applications. - Bellingham : SPIE The International Society for Optical Engineering, 1999 / Atanosov P. ; Stoyanov D. V. - ISSN 0277-786X
    Pagess. 344-348
    Number of pages5 s.
    ActionInternational School on Quantum Eklecttronics: Laser Physics and Aplications /10./
    Event date21.09.1998-25.09.1998
    VEvent locationVarna
    CountryBG - Bulgaria
    Languageeng - English
    CountryUS - United States
    Subject RIVBM - Solid Matter Physics ; Magnetism
    R&D ProjectsGA202/93/0464 GA ČR - Czech Science Foundation (CSF)
    WorkplaceInstitute of Physics
    ContactKristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
    Year of Publishing2000

Number of the records: 1  

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