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RF and DC plasma assisted laser deposition of a-CN.sub.x./sub. thin films

  1. 1.
    Tomov, R. I., Jelínek, M., Bulíř, J. RF and DC plasma assisted laser deposition of a-CNx thin films. In: ATANOSOV, P., STOYANOV, D. V., eds. Tenth International School on Quantum Electronics: Laser Physics and Applications. Bellingham: SPIE The International Society for Optical Engineering, 1999, s. 344-348. Proceedings of the SPIE., 3571. ISSN 0277-786X.

Number of the records: 1  

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