0132319 - FZU-D 990262 RIV US eng J - Journal Article
Wouters, S. - Kadlec, Stanislav - Quaeyhaegens, C. - Stals, L. M.
Plasma diagnostics in triode ion plating system.
Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. Roč. 16, č. 5 (1998), s. 2816-2826. ISSN 0734-2101. E-ISSN 1520-8559
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 1.612, year: 1998
Permanent Link: http://hdl.handle.net/11104/0030350