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Formation of Ti.sub.1-xSi./sub.x and Ti.sub.1-xSi./sub.xN films by magnetron co-sputtering
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SYSNO 0132189 Title Formation of Ti1-xSix and Ti1-xSixN films by magnetron co-sputtering Author(s) Musil, Jindřich (FZU-D) RID, ORCID
Jankovcová, H. (CZ)
Cibulka, V. (CZ)Source Title Czechoslovak Journal of Physics. Roč. 49, č. 3 (1999), s. 359-372. - : Springer Document Type Článek v odborném periodiku Grant GV106/96/K245 GA ČR - Czech Science Foundation (CSF) VS96059 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ME 173 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Language eng Country CZ Permanent Link http://hdl.handle.net/11104/0000555
Number of the records: 1