Number of the records: 1
Formation of Ti.sub.1-xSi./sub.x and Ti.sub.1-xSi./sub.xN films by magnetron co-sputtering
- 1.Musil, J., Jankovcová, H., Cibulka, V. Formation of Ti1-xSix and Ti1-xSixN films by magnetron co-sputtering. Czechoslovak Journal of Physics. 1999, 49(3), 359-372. ISSN 0011-4626.
Number of the records: 1