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Inductively-coupled-plasma assisted planar magnetron discharge for enhanced ionization of sputtered atoms
- 1.SETSUHARA, Y., KAMAI, M., MIYAKE, S., MUSIL, J. Inductively-coupled-plasma assisted planar magnetron discharge for enhanced ionization of sputtered atoms. Japanese Journal of Applied Physics. 1997, 36(7B), 4568-4571. ISSN 0021-4922. E-ISSN 1347-4065.
Number of the records: 1