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The formation of nanoclusters in a-Si thin films induced by pulsed laser UV irradiation

  1. 1.
    SYSNO0131963
    TitleThe formation of nanoclusters in a-Si thin films induced by pulsed laser UV irradiation
    Author(s) Chvoj, Zdeněk (FZU-D)
    Cháb, V. (CZ)
    Borusík, O. (CZ)
    Source Title Journal of Vacuum Science & Technology B. Roč. 15, - (1997), s. 1445-1448. - : American Institute of Physics
    Document TypeČlánek v odborném periodiku
    Grant IAA1010719 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    CIPA-CT-0217
    OK 148 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    Languageeng
    CountryUS
    Permanent Linkhttp://hdl.handle.net/11104/0030005
     

Number of the records: 1  

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