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The formation of nanoclusters in a-Si thin films induced by pulsed laser UV irradiation

  1. 1.
    Chvoj, Z., Cháb, V., Borusík, O. The formation of nanoclusters in a-Si thin films induced by pulsed laser UV irradiation. Journal of Vacuum Science & Technology B. 1997, 15(-), 1445-1448. ISSN 1071-1023. E-ISSN 2166-2754.

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