0131890 - FZU-D 980344 RIV US eng J - Journal Article
Musil, Jindřich - Rajský, Antonín - Bell, Albert J. - Matouš, Jaromír - Čepera, M.
High-rate magnetron sputtering.
Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. Roč. 14, č. 4 (1996), s. 2187-2191. ISSN 0734-2101. E-ISSN 1520-8559
R&D Projects: GA ČR GV106/96/K245
Impact factor: 1.613, year: 1996
Permanent Link: http://hdl.handle.net/11104/0029933