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Magnetron sputter epitaxy of SimGen/Si(001) strained layer superlattices
- 1.Sutter, P., Schwarz, C., Müller, E., Železný, V., Goncalves, C. S., Von Känel, H. Magnetron sputter epitaxy of SimGen/Si(001) strained layer superlattices. Applied Physics Letters. 1994, 65(17), 2220-? ISSN 0003-6951. E-ISSN 1077-3118.
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