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The influence of deposition conditions on the growth and mechanical properties of CxHy films obtained by ECR plasma-activated CVD
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SYSNO ASEP 0131674 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title The influence of deposition conditions on the growth and mechanical properties of CxHy films obtained by ECR plasma-activated CVD Author(s) Shaginyan, L. R. (UA)
Jastrabík, Lubomír (FZU-D) RID, ORCID
Fendrych, František (FZU-D) RID, ORCID, SAI
Novák, J. (ed.)Source Title Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972
Roč. 99, - (1998), s. 42-51Language eng - English Country CH - Switzerland Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 1999
Number of the records: 1