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The influence of deposition conditions on the growth and mechanical properties of CxHy films obtained by ECR plasma-activated CVD

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    0131674 - FZU-D 980166 RIV CH eng J - Journal Article
    Shaginyan, L. R. - Jastrabík, Lubomír - Fendrych, František - Novák, J. (ed.)
    The influence of deposition conditions on the growth and mechanical properties of CxHy films obtained by ECR plasma-activated CVD.
    Surface and Coatings Technology. Roč. 99, - (1998), s. 42-51. ISSN 0257-8972. E-ISSN 1879-3347
    Grant - others:CIPA(XE) CT94-0100
    Impact factor: 0.900, year: 1998
    Permanent Link: http://hdl.handle.net/11104/0029729


     
     

Number of the records: 1  

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