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Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films
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$a Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films 215 $a 4 s. 463 -1
$1 200 1 $a International Congres on Plasma Physics $v s. 2805-2808 $1 702 1 $a Pavlo $b P. $4 340 $1 210 $a Praha $c European Physics Society $d 1998 $1 225 1 $a European Conference Abstaracts. $i C $v 22 700 -1
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Number of the records: 1