0131624 - FZU-D 980697 RIV CZ eng C - Conference Paper (international conference)
Kadlec, Stanislav - Maček, M. - Wouters, S. - Navinšek, B. - Paujan, P. - Quaeyhaegeis, C. - Stals, L. M.
Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films.
International Congres on Plasma Physics. Praha: European Physics Society, 1998 - (Pavlo, P.), s. 2805-2808. European Conference Abstaracts. C, 22.
[Conference on Controlled Fusion and Plasma Physics /25./ (1998 ICPP). Praha (CZ), 29.06.1998-03.07.1998]
R&D Projects: GA ČR GV106/96/K245
Grant - others:NATO - Collab research grant(XX) HTECH.CRG970529
Subject RIV: BL - Plasma and Gas Discharge Physics
Permanent Link: http://hdl.handle.net/11104/0029682