Low-pressure magnetron sputtering and selfsputtering discharges

Number of the records: 1

SYSNO	0131149
Title	Low-pressure magnetron sputtering and selfsputtering discharges
Author(s)	Kadlec, Stanislav (FZU-D)_ORCID Musil, Jindřich (FZU-D)_{RID, ORCID}
Source Title	Vacuum. Roč. 47, - (1996), s. 307-311. - : Elsevier
Document Type	Článek v odborném periodiku
Language	eng
Country	GB
Permanent Link	http://hdl.handle.net/11104/0029234

Number of the records: 1