Number of the records: 1  

Low-pressure magnetron sputtering and selfsputtering discharges

    1.
    SYSNO ASEP0131149
    Document TypeJ - Journal Article
    R&D Document TypeJournal Article
    Subsidiary JOstatní články
    TitleLow-pressure magnetron sputtering and selfsputtering discharges
    Author(s) Kadlec, Stanislav (FZU-D) ORCID
    Musil, Jindřich (FZU-D) RID, ORCID
    Source TitleVacuum. - : Elsevier - ISSN 0042-207X
    Roč. 47, - (1996), s. 307-311
    Languageeng - English
    CountryGB - United Kingdom
    WorkplaceInstitute of Physics
    ContactKristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
    Year of Publishing1997

Number of the records: 1  

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