Number of the records: 1
Low-pressure magnetron sputtering and selfsputtering discharges
SYS 0131149 LBL 00000nam^^22^^^^^^^^450 005 20210803154930.4 101 0-
$a eng 102 $a GB 200 1-
$a Low-pressure magnetron sputtering and selfsputtering discharges 463 -1
$1 001 cav_un_epca*0257687 $1 011 $a 0042-207X $e 1879-2715 $1 200 1 $a Vacuum $v Roč. 47, - (1996), s. 307-311 $1 210 $c Elsevier 700 -1
$3 cav_un_auth*0100275 $a Kadlec $b Stanislav $p FZU-D $4 070 $T Fyzikální ústav AV ČR, v. v. i. 701 -1
$3 cav_un_auth*0100398 $a Musil $b Jindřich $p FZU-D $w Fabrication and Analysis of Functional Materials $4 070 $T Fyzikální ústav AV ČR, v. v. i.
Number of the records: 1