Number of the records: 1
Low-pressure magnetron sputtering and selfsputtering discharges
- 1.Kadlec, S., Musil, J. Low-pressure magnetron sputtering and selfsputtering discharges. Vacuum. 1996, 47(-), 307-311. ISSN 0042-207X. E-ISSN 1879-2715.
Number of the records: 1