Contrast Generation in Low Energy SEM Imaging of Doped Semiconductor

Number of the records: 1

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SYSNO	0109047
Title	Contrast Generation in Low Energy SEM Imaging of Doped Semiconductor
Title	Tvorba kontrastu při zobrazení dopovaného polovodiče v nízkoenergiovém REM
Author(s)	Mika, Filip (UPT-D)_{RID, SAI, ORCID} Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	Proceedings of the 9th International Seminar Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. s. 51-52. - Brno : Institute of Scientific Instruments AS CR, 2004 / Müllerová I.
Conference	Recent Trends /9./ in Charged Particle Optics and Surface Physics Instrumentation, Skalský Dvůr, 12.07.2004-16.07.2004
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	KJB2065301 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
Language	eng
Country	CZ
Keywords	low energy SEM * doped semiconductor
Permanent Link	http://hdl.handle.net/11104/0016159

Number of the records: 1