Contrast Generation in Low Energy SEM Imaging of Doped Semiconductor

Mika, Filip; Frank, Luděk

Number of the records: 1

Contrast Generation in Low Energy SEM Imaging of Doped Semiconductor

1.

SYSNO ASEP	0109047
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Contrast Generation in Low Energy SEM Imaging of Doped Semiconductor
Title	Tvorba kontrastu při zobrazení dopovaného polovodiče v nízkoenergiovém REM
Author(s)	Mika, Filip (UPT-D)_{RID, SAI, ORCID} Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	Proceedings of the 9th International Seminar Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : Institute of Scientific Instruments AS CR, 2004 / Müllerová I. - ISBN 80-239-3246-2
Pages	s. 51-52
Number of pages	2 s.
Action	Recent Trends /9./ in Charged Particle Optics and Surface Physics Instrumentation
Event date	12.07.2004-16.07.2004
VEvent location	Skalský Dvůr
Country	CZ - Czech Republic
Event type	WRD
Language	eng - English
Country	CZ - Czech Republic
Keywords	low energy SEM ; doped semiconductor
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	KJB2065301 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
Annotation	Functional details of semiconductor structures keep decreasing in size. Among the structure elements the locally doped patterns play crucial role so that tools are needed for their observation. For fast diagnosis and quality check of the semiconductor structures the scanning electron microscope is useful because of its wide range of magnification, availability of different signal modes, speed of data acquisition and nondestructive nature of the technique in general, especially at low voltage operations. The dopant concentration in semiconductor is quantitatively determined via acquisition of signal of the secondary electron (SE) emission in such a way that the image contrast is measured between areas of different type or rate of doping
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2005

Number of the records: 1