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Detection of angular distribution of signal electrons in low-voltage SEM
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SYSNO ASEP 0109026 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Detection of angular distribution of signal electrons in low-voltage SEM Title Detekce úhlového rozložení signálních elektronů v nízkoenergiovém REM Author(s) Vlček, Ivan (UPT-D) RID, ORCID, SAI
Lencová, Bohumila (UPT-D) RID, SAI
Horáček, Miroslav (UPT-D) RID, ORCID, SAISource Title EMC 2004 - Proceedings of the 13th European Microscopy Congress, 1 - Instrumentation & Methodology.. - Liege : Belgian Society for Microscopy, 2004 Pages s. 337-338 Number of pages 2 s. Action EMC 2004 /13./ European Microscopy Congress Event date 22.08.2004-27.08.2004 VEvent location Antwerp Country BE - Belgium Event type WRD Language eng - English Country BE - Belgium Keywords low energy SEM ; Wien filter ; CCD detector Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GA202/03/1575 GA ČR - Czech Science Foundation (CSF) Annotation In an UHV apparatus designed in ISI Brno, a low-energy SEM (a scanning LEEM) is realized by adding a cathode-lens attachment to a SEM. Our aim is redesign the LESEM in the apparatus to allow the detection of the angular distribution of signal electrons. For this we have to separate the signal electrons from the primary beam with a Wien filter and project the image of the back-focal plane of the objective lens on an area-sensitive detector (a back-illuminated CCD). For this we have to design a new electrostatic optics working in UHV Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2005
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