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Detection of angular distribution of signal electrons in low-voltage SEM

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    0109026 - UPT-D 20040027 RIV BE eng C - Conference Paper (international conference)
    Vlček, Ivan - Lencová, Bohumila - Horáček, Miroslav
    Detection of angular distribution of signal electrons in low-voltage SEM.
    [Detekce úhlového rozložení signálních elektronů v nízkoenergiovém REM.]
    EMC 2004 - Proceedings of the 13th European Microscopy Congress. Vol. 1. Liege: Belgian Society for Microscopy, 2004, s. 337-338.
    [EMC 2004 /13./ European Microscopy Congress. Antwerp (BE), 22.08.2004-27.08.2004]
    R&D Projects: GA ČR GA202/03/1575
    Keywords : low energy SEM * Wien filter * CCD detector
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0016138
     
     
Number of the records: 1  

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