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Study of plasma in hybrid PLD system for CN.sub.x./sub. films creation
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SYSNO ASEP 0104234 Document Type K - Proceedings Paper (Czech conf.) R&D Document Type Conference Paper Title Study of plasma in hybrid PLD system for CNx films creation Title Studium plasmy v hybridním PLD systému pro přípravu CNx vrstev Author(s) Novotný, Michal (FZU-D) RID, ORCID, SAI
Jelínek, Miroslav (FZU-D) RID, ORCID
Bulíř, Jiří (FZU-D) RID, ORCID, SAI
Lančok, Ján (FZU-D) RID, ORCID
Zelinger, Zdeněk (UFCH-W) RID, ORCIDSource Title Optické komunikace. - Praha : TechMarket, Praha, 2002
s. 124-125Number of pages 2 s. Action Workshop O.K. 2002 Event date 01.10.2002-05.10.2002 VEvent location Praha Country CZ - Czech Republic Event type CST Language eng - English Country CZ - Czech Republic Keywords CN x films ; hybrid PLD system Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects IAA1010110 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z1010914 - FZU-D Annotation We have developed hybrid PLD systems (combination of PLD and additional radiofrquency discharges) for increasing active nitrogen concentration in plasma and consequently N/C ratio in deposited films. For study of plasma and plasma processes we have used OES Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2005
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