0103226 - UFP-V 20040095 RIV GB eng C - Conference Paper (international conference)
Adámek, Jiří - Martines, E. - Cavazzana, R. - Spolaore, M. - Zuin, M. - Serianni, G. - Antoni, V.
Synchronization of drift waves a DC magnetron sputtering device.
[Synchronizace driftové vlny v DC magnetronu pro naprašování.]
Proceedings of the 31th EPS on Controlled Fusion and Plasma Physics. London: EPS, 2004, s. 227-230. EPS.
[EPS Conference on Controlled Fusion and Plasma Physics/31./. London (GB), 28.06.2004-02.07.2004]
Institutional research plan: CEZ:AV0Z2043910
Keywords : magnetron, probe
Subject RIV: BL - Plasma and Gas Discharge Physics
http://eps2004.clf.rl.ac.uk/pdf/P4_227.pdf

The magnetron sputtering plasma is a magnetized glow discharge established between a cathode and the vacuum vessel. A system of active electrodes has been used to impose a rotating perturbation inside the plasma, with the aim of affecting the dynamics of the naturally present modes, which are interpreted as drift waves. By applying a perturbation having the same wavenumber and frequency of one of the plasma modes it has been proved that it is possible to transfer energy to this mode. A phase synchronization between the external perturbation and the natural mode has been observed to occur intermittently. A clear relationship between the phase synchronization and the relative energy of the selected mode has been found. The observed phenomenology has the features of a resonant process. Counter-rotating perturbations are found to be ineffective.

Magnetronové plazma je realizován doutnavým výbojem v magnetickém poli mezi katodou a vakuovou nádobou. Systém elektrod byl navržen tak, aby dokázal vnutit plazmatu poruchu, která by dokázala ovlivnit dynamiku typického módu. Aplikováním rotující poruchy se stejným vlnovým číslem a frekvencí jako typický mód, jsme prokázali tok energie do tohoto módu. Byla také prokázána souvislost mezi fází poruchy a typického módu.
Permanent Link: http://hdl.handle.net/11104/0010542