Degradation and stress evolution in a-C, a-C:H a Ti-C:H films

Number of the records: 1

SYSNO ASEP	0100169
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Ostatní články
Title	Degradation and stress evolution in a-C, a-C:H a Ti-C:H films
Title	Degradace a vývoj pnutí ve vrstvách a-C, a-C:H a Ti-C:H
Author(s)	Kulykovskyy, Valeriy (FZU-D)_RID Boháč, Petr (FZU-D)_{RID, ORCID} Franc, František (FZU-D) Chvostová, Dagmar (FZU-D)_{RID, SAI, ORCID} Deyneka, Alexander (FZU-D) Vorlíček, Vladimír (FZU-D)_RID Jastrabík, Lubomír (FZU-D)_{RID, ORCID}
Source Title	Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972 142-144, - (2001), s. 702-706
Number of pages	5 s.
Language	eng - English
Country	NL - Netherlands
Keywords	sputtering ; diamond-like carbon ; stress evolution ; coating degradation
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	LN00A015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z1010914 - FZU-D
Annotation	Some observations of the stress evolution and degradations of diamond-like a-C, a-C:H and Ti-C (10-20 at.% of Ti) films deposited by magnetron sputtering of the C or Ti target in the Ar or Ar+CH₄ gas mixture are presented. The compressive stress increased during several days for Ti-C:H films but not for a-C films. The growth of stress was accompanied by a decrease of optical constants n and k
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2005

Number of the records: 1