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Height profile measurement by means of white light interferometry

  1. 1.
    SYSNO0100119
    TitleHeight profile measurement by means of white light interferometry
    TitleMěření výškového profilu pomocí interferometrie v bílém světle
    Author(s) Pavlíček, Pavel (FZU-D) RID, ORCID, SAI
    Source TitleWave and Qantum Aspects of Contemporary Optics. s. 139-144. - Washington : SPIE The International Society for Optical Engineering, 2003 / Zajac M. ; Masajada J.
    Conference Polish-Czech-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics /13./, Krzyzowa, 09.09.2002-13.09.2002
    Document TypeKonferenční příspěvek (zahraniční konf.)
    Grant LN00A015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    CEZAV0Z1010921 - FZU-D
    Languageeng
    CountryUS
    Keywords white-light interferometry * height profile * rough surface * speckle pattern
    Permanent Linkhttp://hdl.handle.net/11104/0007625
     

Number of the records: 1  

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